Phenom ParticleX TC
The Thermo Scientific™ Phenom™ ParticleX Scanning Electron Microscope (SEM) for Technical Cleanliness. The Phenom ParticleX TC Desktop SEM is a multi-purpose desktop SEM enabling cleanliness at the microscale.
Take in-house control of your data:
- Versatile solution
- VDA19 or ISO16232 confirmation
It is equipped with a chamber that allows the analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput.
Specifications
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
Vacuum modes
Detector
Sample size
Sample height
Phenom Pharos Desktop SEM
Light optical magnification
20–134x
Electron optical magnification range
200–1,000,000x
Resolution
2.5 nm SED and 4 nm BSD
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
Up to 32 mm diameter
Sample height
Up to 100 mm
Phenom XL Desktop SEM
Light optical magnification
3–16x
Electron optical magnification range
80–100,000x
Resolution
≤ 14 nm
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Max. 65 mm
Phenom Perception GSR
Light optical magnification
3–16x
Electron optical magnification range
80–100,000x
Resolution
≤ 14 nm
Digital zoom
Max. 12x
Light optical navigation camera
Color
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode
Vacuum modes
- High vacuum mode
- Standard mode
- Charge reduction mode
Detector
- BSD
- Fully integrated EDS
- SED optional
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Max. 65 mm
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Gallery
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