Phenom ParticleX TC
The Thermo Scientific™ Phenom™ ParticleX Scanning Electron Microscope (SEM) for Technical Cleanliness. The Phenom ParticleX TC Desktop SEM is a multi-purpose desktop SEM enabling cleanliness at the microscale.
Take in-house control of your data:
- Versatile solution
- VDA19 or ISO16232 confirmation
It is equipped with a chamber that allows the analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput.
Specifications
Phenom Pharos Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 2 kV and 15 kV
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
Sample height
Phenom XL Desktop SEM
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes
- High vacuum mode
- Medium vacuum mode
- Charge reduction mode (low vacuum mode)
Detector
- BSD
- EDS optional
- SED optional
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height
Phenom Perception GSR
Light optical magnification
Electron optical magnification range
Resolution
Digital zoom
Light optical navigation camera
Acceleration voltages
- Default: 5 kV, 10 kV and 15 kV
- Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode
Vacuum modes
- High vacuum mode
- Standard mode
- Charge reduction mode
Detector
- BSD
- Fully integrated EDS
- SED optional
Sample size
- Max. 100 mm x 100 mm
- Up to 36 x 12 mm pin stubs
Sample height